Shujuan Mao

Vertical Sandwich Gate-All-Around Field-Effect Transistors With Self-Aligned High-k Metal Gates and Small Effective-Gate-Length Variation

Xiaogen Yin, Yongkui Zhang, Huilong Zhu et al. · IEEE Electron Device Letters · 2019 · 78 citations

Engineering, Electrical Engineering, Materials Science +17

Optimization of Structure and Electrical Characteristics for Four-Layer Vertically-Stacked Horizontal Gate-All-Around Si Nanosheets Devices

Qingzhu Zhang, Jie Gu, Renren Xu et al. · Nanomaterials · 2021 · 72 citations · Full text

Engineering, Electrical Engineering, Materials Science +14

Titanium-based ohmic contacts in advanced CMOS technology

Shujuan Mao, Jun Luo · Journal of Physics D Applied Physics · 2019 · 42 citations

Engineering, Electrical Engineering, Materials Science +17

Vertical Sandwich GAA FETs With Self-Aligned High-<i>k</i> Metal Gate Made by Quasi Atomic Layer Etching Process

Yongkui Zhang, Xuezheng Ai, Xiaogen Yin et al. · IEEE Transactions on Electron Devices · 2021 · 30 citations

Engineering, Electrical Engineering, Materials Science +16

Impact of Ge Preamorphization Implantation on Both the Formation of Ultrathin TiSi_{&lt;italic&gt;x&lt;/italic&gt;} and the Specific Contact Resistivity in TiSi_{&lt;italic&gt;x&lt;/italic&gt;}/n-Si Contacts

Shujuan Mao, Guilei Wang, Jing Xu et al. · IEEE Transactions on Electron Devices · 2018 · 24 citations

Engineering, Materials Engineering, Materials Science +16