J. Nulman

A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots

S. Venkatesh, Rob Davenport, P. Foxhoven et al. · IEEE Transactions on Semiconductor Manufacturing · 1997 · 255 citations

Cluster Computing, Engineering, Industrial Engineering +19

Rapid thermal processing of thin gate dielectrics. Oxidation of silicon

J. Nulman, J.P. Krusius, A. Gat · IEEE Electron Device Letters · 1985 · 133 citations

Engineering, Oxidation Resistance, Thin Film Process Technology +16

Additively Manufactured Millimeter-Wave Dual-Band Single-Polarization Shared Aperture Fresnel Zone Plate Metalens Antenna

Jianfeng Zhu, Yang Yang, Mengze Li et al. · IEEE Transactions on Antennas and Propagation · 2021 · 77 citations · Full text

Fresnel Zone Plate, Engineering, Millimeter Wave Technology +9

Direct current conduction properties of sputtered Pt/(Ba0.7Sr0.3)TiO3/Pt thin films capacitors

Windsor Hsu, J. D. Luttmer, R. Tsu et al. · Applied Physics Letters · 1995 · 54 citations

Materials Engineering, Materials Science, Electrical Engineering +15

3D-Printed Low-Profile Single-Substrate Multi-Metal Layer Antennas and Array With Bandwidth Enhancement

Mengze Li, Yang Yang, Francesca Iacopi et al. · IEEE Access · 2020 · 48 citations · Full text

Patch Antenna Elements, Engineering, Antenna +10