Alexander Padiy

Near-field read-out of a 50-GB first-surface disc with NA=1.9 and a proposal for a cover-layer-incident, dual-layer near-field system

Ferry Zijp, Martin B. van der Mark, Julian I. Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 32 citations

Engineering, Optic Design, Optical Testing +19

Holistic optimization architecture enabling sub-14-nm projection lithography

Jan Mulkens, Paul Hinnen, Michael Kubis et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 31 citations

Optical Engineering, Lithography Performance Requirements, Wafer Scale Processing +15

High order field-to-field corrections for imaging and overlay to achieve sub 20-nm lithography requirements

Jan Mulkens, Michael Kubis, Paul Hinnen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations

Engineering, Electron-beam Lithography, Microscopy +19

Signal processing for 35GB on a single-layer Blu-ray disc

Alexander Padiy, Bin Yin, Coen A. Verschuren et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 18 citations

Photonics, Optical Memory, Optical Materials +13