Kim Y. Lee - Concepedia

Author

Kim Y. Lee

Also Known As

Kim Y. Lee

Publications

126

Citations

H-Index

Concepts

All Affiliations

Kim Y. Lee is an author at Applied Materials (United States) specializing in applied physics, engineering, and nanolithography.

#	Concept	H-Index	Publications	Citations
1	Engineering	1	1	122
2	Applied Physics	1	1	122
3	Materials Science	1	1	122
4	Microelectronics	1	1	122
5	Microscopy	1	1	122

Kim Y. Lee

Publications

122

Citations

H-Index

Page 1

	Year	Citations
Multiple electron-beam lithography T. H. P. Chang, Marián Maňkoš, Kim Y. Lee, Microelectronic Engineering Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicroscopy	2001	122

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