1
Publications
122
Citations
1
H-Index
2001
Active since
Affiliations
Applied Materials (United States)(Current)
Kim Y. Lee is an author at Applied Materials (United States) specializing in applied physics, engineering, and nanolithography.
Top concepts
MicroscopyEngineeringApplied PhysicsNanolithographyOptoelectronicsMaterial ScienceMicroelectronicsMicrofabrication
Publications per year
2001–2001
1
1
Multiple electron-beam lithography
T. H. P. Chang, Marián Maňkoš, Kim Y. Lee et al. · Microelectronic Engineering · 2001 · 122 citations
Materials Science, Engineering, Electron-beam Lithography +9
Rows per page
1–1 of 1