Concepedia

Eric Pabo

EP

Statistics

Publications

4

Citations

71

H-Index

4

Active since

2009

Affiliations

EV Group (Austria)(Current)

Eric Pabo is an author at EV Group (Austria) specializing in engineering, microfabrication, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabricationElectronic PackagingMicroelectronicsMaterials EngineeringCorrosion3D IntegrationMicrostructure

Publications per year

2009–2013

4

Publications

4

CMOS: compatible wafer bonding for MEMS and wafer-level 3D integration

Viorel Drăgoi, Eric Pabo, Jürgen Burggraf et al. · Microsystem Technologies · 2012 · 33 citations

3D Ic Architecture, Electrical Engineering, Wafer Scale Processing +10

Wafer bonding using Cu–Sn intermetallic bonding layers

Christoph Flötgen, M. Pawlak, Eric Pabo et al. · Microsystem Technologies · 2013 · 17 citations

Materials Engineering, Materials Science, Wafer Scale Processing +5

Adhesive wafer bonding with photosensitive polymers for MEMS fabrication

Erkan Çakmak, Viorel Drăgoi, Elliott S. Capsuto et al. · Microsystem Technologies · 2009 · 11 citations

Materials Science, Wafer Scale Processing, Engineering +4

Cu-Sn transient liquid phase wafer bonding for MEMS applications

Christoph Flötgen, M. Pawlak, Eric Pabo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 10 citations

Engineering, Mechanical Engineering, Interconnect (Integrated Circuits) +16

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