S. Guilet

The LUCIA beamline at SOLEIL

Delphine Vantelon, Nicolas Trcera, Denis Roy et al. · Journal of Synchrotron Radiation · 2016 · 98 citations · Full text

Natural Sciences, Physics, Optical Materials +7

Development of ion sources from ionic liquids for microfabrication

Carla Perez-Martinez, S. Guilet, N. Gogneau et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 48 citations

Engineering, Materials Engineering, Materials Science +16

Continuous-wave operation of photonic band-edge laser near 1.55 µm on silicon wafer

G. Vecchi, Fabrice Raineri, I. Sagnes et al. · Optics Express · 2007 · 45 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Sidewall passivation assisted by a silicon coverplate during Cl2–H2 and HBr inductively coupled plasma etching of InP for photonic devices

S. Bouchoule, G. Patriarche, S. Guilet et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 43 citations

Engineering, Materials Engineering, Materials Science +17

Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements

G. A. Curley, L. Gatilova, S. Guilet et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +16