Concepedia

G. A. Curley

GA

1

Publications

40

Citations

1

H-Index

2010

Active since

Affiliations

Laboratoire de Physique des Plasmas(Current)

G. A. Curley is an author at Laboratoire de Physique des Plasmas specializing in plasma diagnostics, pulse power, and chemical kinetics.

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Publications per year

2010–2010

1

Publications

1

Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements

G. A. Curley, L. Gatilova, S. Guilet et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 40 citations

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