Christophe Couderc

Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study

Raluca Tiron, Xavier Chevalier, Christophe Couderc et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +17

Improving model-based OPC performance for the 65-nm node through calibration set optimization

Kyle Patterson, Yorick Trouiller, Kevin Lucas et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 29 citations

Engineering, Electrical Engineering, Materials Science +10

Pattern density multiplication by direct self assembly of block copolymers: toward 300mm CMOS requirements

Raluca Tiron, Xavier Chevalier, S. Gaugiran et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 25 citations

Engineering, Materials Engineering, Materials Science +15

High accuracy 65nm OPC verification: full process window model vs. critical failure ORC

Amandine Borjon, Jérôme Belledent, Shumay Shang et al. · Optical Microlithography XVIII · 2005 · 13 citations

Engineering, Manufacturing Engineering, Digital Fabrication +12