Concepedia

Julien Beynet

JB

3

Publications

67

Citations

3

H-Index

2009

Active since

Affiliations

Julien Beynet is an author at IMEC specializing in applied physics, engineering, and thin films.

Top concepts

Thin FilmsEngineeringApplied PhysicsMaterial ScienceMicroelectronicsChemistry3D PrintingSurface ScienceMagnetic ResonanceElectronic Packaging

Publications per year

2009–2012

3

Publications

3

Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)

Julien Beynet, Patrick Wong, Andy Miller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 33 citations

Spin-coated and PECVD low dielectric constant porous organosilicate films studied by 1D and 2D solid-state NMR

Guillaume Gerbaud, Sabine Hediger, Michel Bardet et al. · Physical Chemistry Chemical Physics · 2009 · 19 citations

Materials Science, Materials Engineering, Correlation Nmr Experiments +15

Highly-conformal plasma-enhanced atomic-layer deposition silicon dioxide liner for high aspect-ratio through-silicon via 3D interconnections

Yann Civale, A. Redolfi, Dimitrios Velenis et al. · 2012 4th Electronic System-Integration Technology Conference · 2012 · 15 citations

Engineering, Thin Film Process Technology, Silicon On Insulator +18

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