Statistics
Publications
5
Citations
85
H-Index
5
Active since
2001
Petia Weih is an author at Technische Universität Ilmenau specializing in materials science, materials engineering, and semiconductor surfaces.
Publications per year
2001–2004
5
5
In situ spectroscopic ellipsometry of hydrogen-argon plasma cleaned silicon surfaces
Ch. Förster, F. Schnabel, Petia Weih et al. · Thin Solid Films · 2004 · 14 citations
Etching of SiC with Fluorine ECR Plasma
Christian Förster, V. Cimalla, Ratislav Kosiba et al. · Materials science forum · 2004 · 13 citations · Full text
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