Concepedia

Author

Michael Carcasi

The University of Osaka

Also Known As

M. Carcasi, Michael A. Carcasi, Michael Carcasi

22

Publications

73

Citations

4

H-Index

0

Concepts

All Affiliations

The University of Osaka
MC

About

Michael Carcasi is an author at The University of Osaka.

Michael Carcasi

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2

Publications

27

Citations

2

H-Index

YearCitations

Challenge toward breakage of RLS trade-off for EUV lithography by Photosensitized Chemically Amplified Resist (PSCAR) with flood exposure

Seiji Nagahara, Michael Carcasi, Hisashi Nakagawa,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2016

17

Mesoscale modeling: a study of particle generation and line-edge roughness

Siddharth Chauhan, Mark Somervell, Michael Carcasi,

Journal of Micro/Nanolithography MEMS and MOEMS

2014

10

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