Concepedia

Michael Carcasi

MC

Statistics

Publications

2

Citations

27

H-Index

2

Active since

2014

Affiliations

The University of Osaka(Current)

Michael Carcasi is an author at The University of Osaka.

Publications per year

2014–2016

2

Publications

2

Challenge toward breakage of RLS trade-off for EUV lithography by Photosensitized Chemically Amplified Resist (PSCAR) with flood exposure

Seiji Nagahara, Michael Carcasi, Hisashi Nakagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 17 citations · Full text

Mesoscale modeling: a study of particle generation and line-edge roughness

Siddharth Chauhan, Mark Somervell, Michael Carcasi et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 10 citations

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