Publication | Closed Access
Enhanced coupling factor of surface acoustic wave devices employing ScAlN/diamond layered structure with embedded electrodes
52
Citations
15
References
2015
Year
Materials ScienceElectrical EngineeringEngineeringSonic CrystalPhysical AcousticNanoelectronicsAcoustic MetamaterialSurface ScienceApplied PhysicsAcoustic SensorUltrasoundAcoustic Wave DevicesEmbedded ElectrodesMicromachined Ultrasonic Transducer
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