2004 · 59 citations · 4 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationElectric ActuatorsElectrostatic ActuationElectrostatic ActuatorsMems ActuatorsMems DesignCapacitorsElectric ActuationElectrostatic Mems ActuatorsElectrostatic Microelectromechanical SystemsPower DensityVoltage
Electrostatic actuation is a prevalent method of driving MEMS devices because it is compatible with microfabrication technology and it provides high power density. Electrostatic actuation is achieved by applying a voltage difference between opposite electrodes of deformable capacitors. The induced electrostatic forces deform the capacitor until they are
4
VLSI circuit reconstruction from mask topology
N.P. van der Meijs, J.T. Fokkema · Integration · 1984 · 179 citations · Full text
Engineering, Computer Engineering, Electrical Engineering +7