ePrints Soton (University of Southampton) · 1999 · 11 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesEtching ProcessesMicrofabrication ProcessesSacrificial Layer ProcessingSubstrate PreparationThin Film EtchingVery-large-scale Integration LayoutSacrificial Layer EtchingSubstrate Integrated PackagingSubstrate Materials