Development of 3D integrated circuits for HEP

Concepts

EngineeringComputer EngineeringElectrical EngineeringMicroelectronicsSystem-on-chip DesignDigital Integrated Circuit DesignIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationVery-large-scale Integration Layout3D Integrated Circuits3D IntegrationBandwidthThree-dimensional Integrated Circuit InterconnectsThree-dimensional Integrated Circuit LayoutThree-dimensional Integration

Abstract

Three dimensional integrated circuits are well suited to improving circuit bandwidth and increasing effective circuit density. Recent advances in industry have made 3D integrated circuits an option for HEP. The 3D technology is discussed in this paper and several examples are shown. Design of a 3D demonstrator chip for the ILC is presented.

References

A monolithic active pixel sensor for charged particle tracking and imaging using standard VLSI CMOS technology

R. Turchetta, J.D. Berst, B. Casadei et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2001 · 405 citations

Engineering, Electrical Engineering, Nuclear Engineering +14

Design and testing of monolithic active pixel sensors for charged particle tracking

G. Deptuch, J.D. Berst, G. Claus et al. · IEEE Transactions on Nuclear Science · 2002 · 132 citations · Full text

Engineering, Electrical Engineering, Nuclear Engineering +17

Megapixel CMOS image sensor fabricated in three-dimensional integrated circuit technology

Vyshnavi Suntharalingam, R. Berger, J.A. Burns et al. · 2005 · 122 citations

Engineering, Electrical Engineering, Microelectronics +16

SOI active pixel detectors of ionizing radiation-technology and design development

J. Marczewski, K. Domański, P. Grabiec et al. · IEEE Transactions on Nuclear Science · 2004 · 25 citations

Engineering, Computer Engineering, Electrical Engineering +17

3D System Integration

Armin Klumpp, R. Merkel, Peter Ramm et al. · 2007 · 20 citations

Engineering, Computer Engineering, Systems Engineering +17