Ultraflat single-crystal hexagonal boron nitride for wafer-scale integration of a 2D-compatible high-κ metal gate

Yani Wang, Chao Zhao, Xin Gao, Liming Zheng, Jun Qian, Xiaoyin Gao, Jiade Li, Junchuan Tang, Congwei Tan, Jiahao Wang,

Nature Materials · 2024 · 66 citations · 41 references

Concepts

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