Ultraflat single-crystal hexagonal boron nitride for wafer-scale integration of a 2D-compatible high-κ metal gate - Concepedia

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Ultraflat single-crystal hexagonal boron nitride for wafer-scale integration of a 2D-compatible high-κ metal gate

56

Citations

41

References

2024

Year

Yani Wang, Chao Zhao, Xin Gao, Liming Zheng, Jun Qian, Xiaoyin Gao, Jiade Li, Junchuan Tang, Congwei Tan, Jiahao Wang,

Nature Materials

Semiconductor TechnologyBoron NitrideEngineeringPhysicsHexagonal Boron NitrideApplied PhysicsCondensed Matter PhysicsWafer-scale Integration

References

	Year	Citations

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