X-band Bulk Acoustic Wave Resonator (XBAW) using Periodically Polarized Piezoelectric Films (P3F)

Abstract

This paper demonstrates the scaling of bulk acoustic wave (BAW) resonator to create micro-acoustic RF filtering solutions in the 8 – 12 GHz range for X band applications using periodically polarized piezoelectric films (P3F). P3F BAW technology overcomes the traditional thickness frequency trade-off of single layer BAW technology. P3F BAW resonators fabricated using XBAW process in the frequency range of 8-10 GHz with FoM (${{\text{k}}_{\text{t}}}^2 \times {{\text{Q}}_{\text{p}}}$ product) of 80-120 are reported in this work.