Contact properties of a low-resistance aluminum-based electrode with metal capping layers in vertical oxide thin-film transistors

Sori Jeon, Kwang‐Heum Lee, Seung Hee Lee, Seong‐In Cho, Chi‐Sun Hwang, Jong Beom Ko, Sang‐Hee Ko Park

Journal of Materials Chemistry C · 2023 · 15 citations · 46 references

Concepts

Abstract

Vertical thin-film transistors (TFTs) with low contact resistance are necessary to realize high-resolution displays for virtual reality and augmented reality applications.

References

46