High figure-of-merit in Al-doped ZnO thin films grown by ALD through the Al content adjustment - Concepedia

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High figure-of-merit in Al-doped ZnO thin films grown by ALD through the Al content adjustment

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17

Citations

41

References

2023

Year

Quang Chieu Bui, Vincent Consonni, Sarah Boubenia, Guillaume Gay, Corinne Perret, Mohammed Zeghouane, S. Labau, Hervé Roussel, Xavier Mescot, Gustavo Ardila,

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringAl Content AdjustmentOxide ElectronicsApplied PhysicsGallium OxideThin FilmsHigh Figure-of-meritThin Film Processing

References

	Year	Citations

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