Measurement · 2023 · 28 citations · 24 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsSystem-on-chip DesignMems DesignMems FabricationMems MaterialsMems ModelingMems SensorsMicroelectromechanical SensorsAsic ImplementationGyroscopesInertial MemsMems Sensor InterfacingTemperature Compensation
24