Concepedia

A synergistic polishing technology by mixed abrasives with photocatalysis and fenton reaction

Wang Jiang, Hai Zhou, Youming Yang, Shixiang Hu, Jian Song, Jian Ji, Jinde Song

Materials Science in Semiconductor Processing · 2023 · 18 citations · 4 references

DOI

Concepts

References

4

Effect of photocatalytic oxidation technology on GaN CMP

Jie Wang, Tongqing Wang, Guoshun Pan et al. · Applied Surface Science · 2015 · 64 citations

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Highly efficient and damage-free polishing of GaN (0 0 0 1) by electrochemical etching-enhanced CMP process

Linfeng Zhang, Hui Deng · Applied Surface Science · 2020 · 62 citations

, , +14

Efficient and slurryless ultrasonic vibration assisted electrochemical mechanical polishing for 4H–SiC wafers

Xiaozhe Yang, Xu Yang, Haiyang Gu et al. · Ceramics International · 2021 · 61 citations

, , +16

Effects of quantities and pole-arrangements of magnets on the magneto-rheological polishing (MRP) performance of sapphire hemisphere

Quan Zhai, Wenjie Zhai, Bo Gao · Applied Surface Science · 2022 · 26 citations

, , +11