Microelectronic Engineering · 2023 · 18 citations · 6 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor PhysicsSilicon MaterialsWide-bandgap SemiconductorsEpitaxial Film GrowthPower Electronics DevicesSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Power DevicesSilicon Carbide Power ElectronicsSilicon WafersWide-bandgap Materials Growth
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