Development of n-type epitaxial growth on 200 mm 4H-SiC wafers for the next generation of power devices

Mattia Musolino, E. Carria, Danilo Crippa, Silvio Preti, Mani Azadmand, Marco Mauceri, Mathias Isacson, Michele Calabretta, Angelo Messina

Microelectronic Engineering · 2023 · 18 citations · 6 references

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