Engineering Fracture Mechanics · 2022 · 23 citations · 16 references
EngineeringMaterials EngineeringMaterials ScienceManufacturing ProcessesMicrofabricationSemiconductor DevicesCnc MachiningDevice ModelingIntegrated Circuit FabricationMachiningSilicon MaterialsWafer BondingMicromachining Of Silicon WafersSilicon Wafer ProcessingSilicon WafersWafer Dicing
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