International Journal of Precision Engineering and Manufacturing · 2022 · 19 citations · 6 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ProcessingSurface EngineeringSurface ScienceDefect CharacterizationDefects In Electronic MaterialsSemiconductor Device MaterialsSemiconductor SurfacesSurface HardeningSurface PhysicsPolishing MaterialsPolishing ProcessesPolishing-induced Surface DamageSemiconductor Wafer PolishingSilicon CarbideSilicon Carbide (Sic) MaterialsX-ray Diffraction Analysis
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