Hybrid polishing mechanism of single crystal SiC using mixed abrasive slurry (MAS) - Concepedia

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Hybrid polishing mechanism of single crystal SiC using mixed abrasive slurry (MAS)

94

Citations

11

References

2010

Year

Hyunseop Lee, D.I. Kim, Jingyan An, H.J. Lee, K.H. Kim, Hyun Do Jeong

Materials EngineeringMaterials ScienceSingle Crystal SicMixed Abrasive SlurryEngineeringMechanical EngineeringCeramics MaterialsCarbideAbrasive ProcessSurface PolishingAbrasive MachiningMicrostructure

References

	Year	Citations

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