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Transition in the preferred orientation of RF sputtered ZnO/Si thin films by thermal annealing: Structural, morphological, and optical characteristics

Materials EngineeringMaterials ScienceEngineeringPhysicsPreferred OrientationNanoelectronicsOxide ElectronicsApplied PhysicsSemiconductor MaterialThin FilmsThermal AnnealingZno/si Thin FilmsThin Film Processing