International Journal on Interactive Design and Manufacturing (IJIDeM) · 2022 · 15 citations · 15 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems DesignMems FabricationMems ModelingMems SimulationMems SwitchesRf MemsBeam MechanicsCantilever Beam BendingCantilever Beam DeflectionCantilever MechanicsMechanical ModelingMicromachined Switch DesignNumerical ModellingSwitch Modeling
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A comprehensive study on RF MEMS switch
Haslina Jaafar, K. S. Beh, Nurul Amziah Md Yunus et al. · Microsystem Technologies · 2014 · 78 citations
Engineering, Electrical Engineering, Microelectromechanical Systems +13