IEEE Access · 2022 · 28 citations · 57 references
EngineeringElectrical EngineeringManufacturing EngineeringMachine VisionSemiconductor DevicesSensorsDefect CharacterizationDefect DetectionDefects In Electronic MaterialsFault DetectionManufacturing DefectsWafer BondingBondingBonding DefectsBonding-induced DefectsDeep Learning DetectionDevice Defect DetectionDie-to-wafer BondingSignal TransmissionWire Bonding
Defect detection plays a vital role in the manufacturing process of integrated circuits (ICs). Die attachment and wire bonding are two steps of the manufacturing process that determine the power and signal transmission quality and dependability in an IC. This paper presents a survey or literature review of the methods used for detecting these defects based on different sensing modalities used including optical, radiological, acoustical, and infrared thermography. A discussion of the detection methods used is provided in this survey. Both conventional and deep learning approaches for detecting die attachment and wire bonding defects are considered along with challenges and future research directions.
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Acoustic wave sensors and their technology
Michael J. Vellekoop · Ultrasonics · 1998 · 255 citations
Engineering, Physics, Acoustics +11