Dalton Transactions · 2022 · 22 citations · 29 references
Natural SciencesChemistryMaterials ScienceInorganic ChemistryMaterials ChemistryMetallic MaterialsMetal MaterialsMetalsTransition Metal ChemistryChlorine ChemistryInorganic Substrate MaterialsLow-temperature DepositionNickel ChemistrySubstrate MaterialsTemperature Effects On DepositionThermal Stability
DHP can open new avenues for the ALD of other metals at low temperatures.
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Atomic layer deposition of transition metals
Booyong S. Lim, Antti Rahtu, Roy G. Gordon · Nature Materials · 2003 · 656 citations
Natural Sciences, Materials Engineering, Materials Science +11