A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(<scp>ii</scp>) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine

Anton Vihervaara, Timo Hatanpää, Kenichiro Mizohata, Mykhailo Chundak, Georgi Popov, Mikko Ritala

Dalton Transactions · 2022 · 22 citations · 29 references

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Abstract

DHP can open new avenues for the ALD of other metals at low temperatures.

References

29