Concepedia

Anton Vihervaara

AV

6

Publications

94

Citations

6

H-Index

2019

Active since

Affiliations

University of Helsinki(Current)

Helsinki Institute of Physics

Anton Vihervaara is an author at University of Helsinki.

ORCID

Publications per year

2019–2025

6

Publications

6

Reductive Thermal Atomic Layer Deposition Process for Gold

Anton Vihervaara, Timo Hatanpää, Heta-Elisa Nieminen et al. · ACS Materials Au · 2023 · 23 citations · Full text

Atomic Layer Deposition of CsI and CsPbI<sub>3</sub>

Alexander Weiß, Georgi Popov, Elisa Atosuo et al. · Chemistry of Materials · 2022 · 20 citations · Full text

A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(<scp>ii</scp>) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine

Anton Vihervaara, Timo Hatanpää, Kenichiro Mizohata et al. · Dalton Transactions · 2022 · 18 citations · Full text

Recent trends in thermal atomic layer deposition chemistry

Georgi Popov, Miika Mattinen, Anton Vihervaara et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2025 · 12 citations

Nickel Germanide Thin Films by Atomic Layer Deposition

Katja Väyrynen, Anton Vihervaara, Timo Hatanpää et al. · Chemistry of Materials · 2019 · 11 citations · Full text

Rows per page

1–5 of 6