Concepedia

Publication | Closed Access

Inherent selective pulsed chemical vapor deposition of amorphous hafnium oxide / titanium oxide nanolaminates

DOI

11

Citations

31

References

2022

Year

Yunil Cho, James Huang, Christopher F. Ahles, Zichen Zhang, Keith T. Wong, Srinivas Nemani, Ellie Yieh, Andrew C. Kummel
Applied Surface Science

References

YearCitations

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