Recognition of unknown wafer defect via optimal bin embedding technique

Wafer Map Defect Pattern Classification and Image Retrieval Using Convolutional Neural Network

Takeshi Nakazawa, Deepak V. Kulkarni · IEEE Transactions on Semiconductor Manufacturing · 2018 · 394 citations

Computing, Computer Science, Computer Vision +16

Recent advances in surface defect inspection of industrial products using deep learning techniques

Xiaoqing Zheng, Song Zheng, Yaguang Kong et al. · The International Journal of Advanced Manufacturing Technology · 2021 · 259 citations

Computing, Computer Science, Industrial Engineering +17

Supervised Kohonen networks for classification problems

W.J. Melssen, Ron Wehrens, L.M.C. Buydens · Chemometrics and Intelligent Laboratory Systems · 2006 · 214 citations

Computing, Computer Science, Data Mining +9

Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing

Shao-Chung Hsu, Chen–Fu Chien · International Journal of Production Economics · 2006 · 191 citations

Engineering, Computer Engineering, Manufacturing Engineering +17

Wafer Map Defect Detection and Recognition Using Joint Local and Nonlocal Linear Discriminant Analysis

Jianbo Yu, Xiaolei Lu · IEEE Transactions on Semiconductor Manufacturing · 2015 · 166 citations

Computing, Computer Science, Manufacturing Engineering +16