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Study of deposition parameters of reactive-sputtered Si3N4 thin films by optical emission spectroscopy

DOI

10

Citations

30

References

2022

Year

Raymundo Rodríguez-López, Genaro Soto-Valle, R. Sanginés, N. Abundiz-Cisneros, J. Águila-Muñoz, J. Cruz, R. Machorro-Mejía
Thin Solid Films

References

YearCitations

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