Journal of Materials Science Letters · 1988 · 54 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMaterials ChemistryNanomaterialsAmorphous MaterialsAmorphous SemiconductorsAmorphous SolidsComposite MaterialsInorganic MaterialsNanocompositesAmorphous SiliconAmorphous Thin FilmsDefects In Amorphous MaterialsSilicon Carbide Composites
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Surface Oxidation of Silicon Nitride Films
S. I. Raider, R. Flitsch, J. A. Aboaf et al. · Journal of The Electrochemical Society · 1976 · 249 citations