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Isotropic etching of SiGe alloys with high selectivity to similar materials
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2004
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Materials EngineeringMaterials ScienceEngineeringMicrofabricationApplied PhysicsSimilar MaterialsSemiconductor Device FabricationIsotropic EtchingHigh SelectivityMicroelectronicsPlasma EtchingSilicon On InsulatorMicrostructure
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