2016 · 16 citations · 4 references
EngineeringElectrical EngineeringManufacturing EngineeringMicroelectromechanical SystemsMicroelectronicsMicrowave EngineeringMems FabricationMems PackagingMems SwitchesMems TestingMicrowave MeasurementsRf MemsElectrical Testing Of Mems DevicesHot SwitchingOhmic Mems SwitchesOhmic Rf Mems SwitchesRf Mems FabricationRf Mems PackagingRf Mems SwitchesSwitch Fabrication Processes
This paper details the broadband RF switching challenges in Test and Measurement (T&M) and Automated Test Equipment (ATE) applications, including the need for high performance RF switches capable of 25W. The design, validation and manufacturing of ohmic RF MEMS switches are presented as suitable replacements for electromechanical (EM) switches in T&M and ATE applications. The switches are capable of supporting DC to RF frequencies, reliably hot switching at least 30 dBm of power for millions of cycles, handle as much as 25W of power under cold switching conditions, and are available in standard surface mount (SMT) packages that make them easy to use with low cost, traditional processes.
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The Search for a Reliable MEMS Switch
Gabriel M. Rebeiz, C. D. Patel, Seungoh Han et al. · IEEE Microwave Magazine · 2013 · 128 citations
Engineering, Electrical Engineering, Microelectromechanical Systems +16