Interferometric ellipsometry

Abstract

A new opto-electronic system for ellipsometry, based on laser interferometric principles and capable of giving the relevant information at a high rate (down to 30 ms per Delta , psi pair), is described. The method requires no compensator and may become increasingly important as tunable lasers and wide-range transmitting polarizers become available. Its possible application, in the future, as a sensitive and powerful infrared spectroscopic technique based on phase information is mentioned.