Surface and Coatings Technology · 2022 · 15 citations · 38 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsAluminum OxidesCoatingsMetalsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsMagnetron SputteringOxide Film FormationReactive SputteringSputter DepositionThin Film Deposition MaterialsThin Oxide FilmsThin-film Growth Mechanisms
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Reactive-sputter-deposited TiN films on glass substrates
Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations
Natural Sciences, Materials Engineering, Materials Science +14
The O−Ti (Oxygen-Titanium) system
J. L. Murray, H. A. Wriedt · Journal of Phase Equilibria · 1987 · 316 citations
Natural Sciences, Materials Engineering, Materials Science +9