High carrier mobility tungsten-doped indium oxide films prepared by reactive plasma deposition in pure argon and post annealing

Gan Tian, Jingmei Li, Lili Wu, Jingquan Zhang, Xia Hao, Qingyuan Zhang, Ruixing Li, Wenhui Shi

Materials Science in Semiconductor Processing · 2021 · 20 citations · 41 references

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