The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas - Concepedia

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The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas

19

Citations

25

References

2021

Year

Moritz Kindelmann, Moritz L. Weber, Mark Stamminger, Rahel Buschhaus, E. Wessel, Martin Bram, Olivier Guillon

Journal of the European Ceramic Society

Materials ScienceEngineeringSurface ScienceApplied PhysicsFluorine-based Etching PlasmasPlasma ProcessingPlasma EtchingPhysicochemical Erosion

References

	Year	Citations

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