Rahel Buschhaus

The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas

Moritz Kindelmann, Moritz L. Weber, Mark Stamminger et al. · Journal of the European Ceramic Society · 2021 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +12

Processing map to control the erosion of Y ₂ O ₃ in fluorine based etching plasmas

Moritz Kindelmann, Moritz L. Weber, Mark Stamminger et al. · Journal of the American Ceramic Society · 2022 · 22 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Ion-induced secondary electron emission of oxidized nickel and copper studied in beam experiments

Rahel Buschhaus, Marina Prenzel, Achim von Keudell · Plasma Sources Science and Technology · 2022 · 17 citations · Full text

Natural Sciences, Materials Science, Physics +17

PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth

Teresa de los Arcos, Peter Awakowicz, Jan Benedikt et al. · Plasma Processes and Polymers · 2023 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17