Remarkably stable high mobility self-aligned oxide TFT by investigating the effect of oxygen plasma time during PEALD of SiO2 gate insulator

Seong‐In Cho, Jong Beom Ko, Seung Hee Lee, Junsung Kim, Sang‐Hee Ko Park

Journal of Alloys and Compounds · 2021 · 44 citations · 45 references

Concepts

References

45