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Inhibiting the detrimental Cu protrusion in Cu through-silicon-via by highly (111)-oriented nanotwinned Cu

DOI

33

Citations

40

References

2021

Year

Ting-Chun Lin, Chien-Lung Liang, Shan-Bo Wang, Yung‐Sheng Lin, Chin-Li Kao, David Tarng, Kwang‐Lung Lin
Scripta Materialia

References

YearCitations

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