Versatile fabrication method for multiscale hierarchical structured polymer masters using a combination of photo- and nanoimprint lithography

Mirko Lohse, Marina Heinrich, Susanne Grützner, Anja Haase, Isbaal Ramos, Clarisa Salado, Manuel W. Thesen, Gabi Grützner

Micro and Nano Engineering · 2021 · 16 citations · 23 references

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