Concepedia

Marina Heinrich

MH

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Publications

3

Citations

73

H-Index

3

Active since

2005

Affiliations

Micro Resist Technology (Germany)(Current)

Marina Heinrich is an author at Micro Resist Technology (Germany) specializing in engineering, materials science, and electrical engineering.

Top concepts

Publications per year

2005–2021

3

Publications

3

A single layer negative tone lift-off photo resist for patterning a magnetron sputtered Ti/Pt/Au contact system and for solder bumps

Anja Voigt, Marina Heinrich, Karin Hauck et al. · Microelectronic Engineering · 2005 · 32 citations

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Improved properties of epoxy nanocomposites for specific applications in the field of MEMS/NEMS

Anja Voigt, Marina Heinrich, Cristina Martin‐Olmos et al. · Microelectronic Engineering · 2007 · 25 citations

, , +6

Versatile fabrication method for multiscale hierarchical structured polymer masters using a combination of photo- and nanoimprint lithography

Mirko Lohse, Marina Heinrich, Susanne Grützner et al. · Micro and Nano Engineering · 2021 · 16 citations · Full text

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