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Femtosecond laser modification of silicon carbide substrates and its influence on CMP process

Materials ScienceAdvanced Laser ProcessingEngineeringLaser Micro-processingFemtosecond Laser ModificationApplied PhysicsLaser MaterialSilicon Carbide SubstratesLaser Processing TechnologyCmp ProcessLaser-assisted DepositionPulsed Laser DepositionMicroelectronicsOptoelectronics