BATCH-FABRICATED AREA-EFFICIENT MILLI-ACTUATORS

Laterally driven polysilicon resonant microstructures

William C. Tang, T.-C.H. Nguyen, Roger T. Howe · 2003 · 382 citations

Engineering, Materials Engineering, Materials Science +6

High aspect ratio electroplated microstructures using a photosensitive polyimide process

A. Bruno Frazier, Mark G. Allen · 1992 · 75 citations

Engineering, Materials Engineering, Materials Science +17

Fabrication of high depth-to-width aspect ratio microstructures

G. Engelmann, O. Ehrmann, J. Simon et al. · 1992 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +17