Uniform High-k Amorphous Native Oxide Synthesized by Oxygen Plasma for Top-Gated Transistors

Teng Tu, Yichi Zhang, Tianran Li, Yu Jia, Lingmei Liu, Jinxiong Wu, Congwei Tan, Jilin Tang, Yan Liang, Congcong Zhang,

Nano Letters · 2020 · 65 citations · 29 references

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Abstract

Se is achieved to fabricate discrete electronic components. This facile integration of a high-mobility 2D semiconductor and its high-k native oxide holds high promise for next-generation nanoelectronics.

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