Large-area femtosecond laser milling of silicon employing trench analysis

Arun Bhaskar, Justine Philippe, Flavie Braud, Étienne Okada, Vanessa Avramovic, J.F. Robillard, C. Durand, D. Gloria, Christophe Gaquière, Emmanuel Dubois

Optics & Laser Technology · 2021 · 11 citations · 44 references

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