Optics & Laser Technology · 2021 · 11 citations · 44 references
EngineeringManufacturing EngineeringMaterials EngineeringMicrofabricationPhotonicsSemiconductor DevicesLaser Material ProcessingLaser PhysicsLaser Surface ProcessingMachiningSilicon MaterialsUltrafast OpticsFemtosecond Laser PulsesLaser Beam MachiningLaser MillingSilicon Wafer ProcessingUltrafast Laser Micromachining
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Simple technique for measurements of pulsed Gaussian-beam spot sizes
J. M. Liu · Optics Letters · 1982 · 1.8K citations
Ablation of metals by ultrashort laser pulses
Stefan Nolte, C. Momma, H. Jacobs et al. · Journal of the Optical Society of America B · 1997 · 1.1K citations
Femtosecond laser ablation of silicon–modification thresholds and morphology
Jörn Bonse, S. Baudach, Jörg Krüger et al. · Applied Physics A · 2002 · 807 citations
Ultrashort-pulse laser machining of dielectric materials
M. D. Perry, Brent C. Stuart, P.S. Banks et al. · Journal of Applied Physics · 1999 · 496 citations
Sub-picosecond UV laser ablation of metals
Alexander Demchuk, M. Stuke · Applied Physics A · 1995 · 450 citations · Full text