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Synthesis, structure and optical properties of high-quality VO2 thin films grown on silicon, quartz and sapphire substrates by high temperature magnetron sputtering: Properties through the transition temperature

Materials ScienceOptical MaterialsEngineeringSapphire SubstratesOptical PropertiesOxide ElectronicsSurface ScienceApplied PhysicsTransition TemperatureThin FilmsChemical Vapor DepositionThin Film Processing